China has begun manufacturing domestically developed immersion deep ultraviolet (DUV) lithography machines, a key chipmaking tool long dominated by Dutch supplier ASML, The Information reported yesterday.
The machines are expected to be delivered this year to leading Chinese chipmakers, including Semiconductor Manufacturing International Corp, Hua Hong Semiconductor and ChangXin Memory Technologies, the report said, citing people familiar with the matter.
ASML shares dropped 4.6 per cent after the report.
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